Thank you for the participating to ISIM2013. We sincerely expect to see you on the next opportunity, ISIM2014!
MEMS 8/12" prototype line（TKB812)
Ubiquitous MEMS and MicroEngineering Research Center (UMEMSME), Tsukuba, AIST
1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
Tokyo International Exchange Center
2-2-1 Aomi, Koto-ku, Tokyo 135-8630, Japan
One of the main topics of this symposium is to share and discuss the most recent achievements of the project “Heterogeneous Integrated Microsystems”, conducted under the direction by Professor Esashi at Tohoku University, main researcher of one of the Japanese Funding Programs for World-Leading Innovative R&D on Science and Technology (FIRST).
The other project of the symposium is to discuss about the Micro-nano Hetero system integration technologies, targets the creation of highly function systems by MEMS, LSI, other devices and materials among the attendees from different background and nationalities.
ISIM2013 prepares the simultaneous interpretation, English and Japanese. Let's share the theme for the next stage beyond borders!
Masayoshi Esashi (Core Researcher)
Professor, Micro System Integration Center (μSIC), Tohoku University
Ryutaro Maeda (Co-core Researcher)
Director, Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), AIST